EHD SWIR Microscope

The EHD SWIR Modular Microscope's key technological features:
1. ‌Optical Compatibility: SWIR microscopy leverages standard glass lens systems, avoiding the need for reflective optics required in mid-wave (MWIR) and long-wave infrared (LWIR) imaging. This compatibility allows seamless integration with conventional microscope platforms, reducing retrofitting costs.
2. Silicon Penetration Capability‌: SWIR photons, with energy below silicon’s bandgap (1.1 eV), enable non-destructive inspection of internal defects in silicon-based materials, such as microcracks in semiconductor wafers or soldering failures in electronic components‌.
3. Modular Architecture
o Illumination Module: Combine IR LEDs optimized for SWIR wavelengths, ensuring uniform sample illumination.
o Imaging Module: High-sensitivity sensors and refined optical paths with large NA achieve micron-level resolution and small depth of field. With the Utilizes high-sensitivity InGaAs sensors (e.g., MaxCam-992TR-TR series camera) to achieve micron-level resolution. The camera’s compact design (80 × 80 × 45.5 mm³) and dual-gain mode enhance adaptability for high-speed (up to 35.5fps (USB3), 93fps (CL),118fps (10G)) and low-noise imaging.
o Mechanical Module‌: Features a precision CNC machining with anti-vibration design for stability in automated or high-throughput workflows‌.
SWIR modular microscopes are critical in:
1. ‌Semiconductor Manufacturing‌: Detecting subsurface defects in silicon wafers and chip interconnects‌.
2. ‌Materials Science‌: Identifying invisible cracks in ceramics or composite materials.
3. ‌Industrial Inspection‌: Analyzing subsurface structures in components without destructive disassembly‌.
SWIR modular microscopes advantages over traditional systems are summarized below:
1. ‌Enhanced Material Contrast‌: SWIR wavelengths improve visibility of features obscured in visible light‌.
2. ‌Cost Efficiency‌: Utilizes existing microscope optics and affordable tungsten/LED illumination.
3. ‌Scalability‌: Modular designs enable customization for specific wavelengths, sensors, or automation needs‌.